We understand the flow of water for key applications in semiconductor manufacturing processes Grundfos understands how water flows through semiconductor manufacturing process. Our expertise enables us to resolve key issues in especially the following application areas: Water intake: • Pre-treatment and make-up water • Ultra-pure water (UPW) feed and transfer • Customised pumps that comply with stringent water purity requirements Cooling: • Intelligent and high efficiency solutions for substantial water and energy savings Wastewater treatment and water reuse: • Intelligent pumps for decentralised integration and control of membrane filtration and reverse osmosis systems Service offerings: • Control and monitoring, optimised processes, greater energy efficiency and improved asset reliability WATER INTAKE PRETREATMENT MAKE-UP WATER GROUND (BOREHOLE) SURFACE WATER MUNICIPAL TAP WATER Raw water tank Heat Exchanger Multimeda or Ultrafiltration Filtered Water Tank Activated Carbon Filter Ion Exchange (Softening) Reverse Osmosis TYPICAL PRODUCTION PROCESSES OF SEMICONDUCTORS Scrubber Cooling towers Grinding Stripping Oxidization - CMP Ion implantation Lithography Cleaning Production Etching Permeate Tank UV Treatment 185 nm Ultra Filtration Ion Exchange ( Mixed-bed ) Membrane Degasser POLISHING UPW Membrane Degasser Filtration Heat Exchanger Polishing IX UV treatment 254 nm Heat Exchanger UPW Tank Neutralization HF Treatment Coagulation Flocculation Sedimentation Sludge /Dewatering Ultrafiltration Reverse Osmosis Ion Exchange Waste water Discharge Advanced Disinfection Oxidation Process Solids Management CMP Treatment Water intake & Feed Ground Water Surface Water Tap Water Split-case Pumps LS End-Suction Pumps NB(E)/NK(E) Multistage Pumps CR(E) Submersible Pumps SP Booster Systems Hydro MPC WT Chart Water Treatment Water analyzer DID Dosing Pumps & DID SMART Digital, DME, DMX, DMH Multistage Pumps CR(E) End-Suction Pumps NB(E)/NK(E) End-Suction Pumps CM(E) High-Pressure Pumps BM/BMS WWT Chart Wastewater Treatment Multistage Pumps CR(E) Wastewater pumps S/SE/SL Dosing Pumps & DID SMART Digital, DME, DMX, DMH Dosing Skids DTS/DDS/ Accessories Polymer Preparation POLYDOS Reuse Chart Water Reuse End-Suction Pumps NB(E)/NK(E) Dosing Pumps & DID SMART Digital, DME, DMX, DMH Temperature Control Ground Water Surface Water Tap Water End-Suction Pumps NB(E)/NK(E) Controls and Drivers External Variable Frequency Drivers CUE Integrated motor variable frequency drive MGE Grundfos Remote Management CIM/CIU Multistage Pumps CR(E) Dosing Skids DTS/DDS/ Accessories Circulator Pumps MAGNA Multistage Pumps CR(E) Disinfection Oxiperm Pro End-Suction Pumps CM(E) Singlestage Pumps TP(E) Booster Systems Hydro MPC Level control LC 231, LC241 Multi-pump control CU 362 Direct Sensor Differential pressure sensor/Flow sensors Pressure sensors/Temperature High-Pressure Pumps BM/BMS End-Suction Pumps CM(E) Dosing Pumps & DID SMART Digital, DME, DMX, DMH Disinfection Oxiperm Pro We deliver sustainable and efficient water solutions for semiconductor manufacturing processes
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